Introductory MEMS: Fabrication and Applications by Thomas M. Adams
English | PDF | 2010 | 447 Pages | ISBN : 0387095101 | 5.8 MB
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.